.

Դb

Ըmm

0731-85401283

> > Դb
ʽPECVD
  • ʽPECVD

,,

...
  • bƷc
  • g
  • ù
PECVD xwWշeO䣬ølԴx늮b,,xwWe^ʩӰ푵ļgӺxӵܶ_ 1091012/cm3ƽ_110evڵxwڣMwӵķֽ⡢ϡlxM,,ԻFɣĶeضȡPECVD 200桫500湠ȳĤhС CVD 700桫950湠ȳĤڰl£˻ԻĔUɢĶ߱,,ĤLٶȺ;ԡe^УڴĚڣ𵽱gá Ԕ1
  • 1bܴ󣬆Ƭɱ
    ç450mm܏ķǻЮbܴ󡢆Ƭɱ١ˇܼѵăc̨4O156ƬĮbܿ_18,,00Ƭ/Сrÿ308Ƭ/ͬr240Ƭ/280Ƭ/Įb(Cb½)

    (1)

    2Ԅӻ̶ȸ
    ȫԄϵyһIȫԄӹˇԄӻ,,̶ȵˮbƷ}Ժһԡ
    3߾Ȝضȿ
    аlOӋĠtw߾,,p·ضȿϵy؜ٶȿ죬ƾȾ̎ڇIȵλ
    4IIȵ͉ϵy

    (2)

    аlȫԄӾ]h,,ƼgƾԼr푑30%ϵyӸЧߣǻոӾ
  • 2
  • 1ĤN    
    2bƬߴ缰bƬ   156x156mmƬ308Ƭ/
    3Ĥ    Ƭȡܡ3% Ƭgܡ3% gܡ2%Ĥ80nmңʴ2.04
    4tЧȏ  475mm (ʯӢ⏽450mm)
    5ضȿƹ    300600棻

    (3)

    6؅^Lȼȣ  2/1450mm500棩
    7ؕrg     RT45040min
    8ϵyOգ       3Pa
    9;ȣ     50 Pa3005Pa]hƣ
    10ԣ     ©ʡ110-7pa.m3/s
  • Ŀǰ̫늳ИIҪPECVDOշepgĤ
  • 4
ADVISORY MESSAGEA
ԃ
  • cˢCa
360Wվȫzyƽ̨